Monte Carlo Simulations of Elastic Scattering with Applications to DC and High Power Pulsed Magnetron Sputtering for Ti3SiC2. Commun. Comput. Phys. [Internet]. 2012 Nov. 1 [cited 2026 Mar. 17];11(5):1618-42. Available from: https://staging.gsp.tricubic.dev/cicp/article/view/5958